Southampton Nanofabrication Centre

MEMs Tester

The MSA-400 Micro System Analyser provides premier measurement technology for the analysis and visualization of structural vibrations and surface topology in microstructures such as MEMS. It offers a microscope integrated with Scanning Laser-Doppler Vibrometry, Stroboscopic Video Microscopy and White light Interferometry. It is suitable for characterizing out-of-plane and in-plane motion of MEMS devices, continuous frequency domain measurements for device performance analysis, microstructure failure analysis and reliability testing, testing and refining of simulation models. Transient behaviour analysis using time-domain, identification of in-plane resonances through out-of-plane coupling, step response and ring down measurements to determine actuator settling times, wafer-level MEMS motion analysis using a probe station, bode plot graphs and analysis.