Southampton Nanofabrication Centre

Access

The Southampton Nanofabrication Centre provides a service for fabrication, characterisation and collaborative research both internal to the University of Southampton and to the broader community in the UK and the EU. Our strength is our flexible approach in sharing a World Class nanofabrication centre for the benefit of all users.

Commercial Fabrication

The Centre is equipped with a wide range of traditional microfabrication and state-of-the-art nanofabrication equipment which can cater for any fabrication need. We can offer full device/circuit fabrication covering a variety of technologies, including but not limited to: silicon electronics; photonics and nanophotonics; MEMs/NEMs; Lab-on-a-Chip, spintronics and so on. One-off device/circuit fabrication or small volume initial production runs can be catered for.

Commercial Characterisation

The Centre is equipped with an extensive range of equipment for electronic and optical characterisation and nanometrology methods. There is a state-of-the-art FESEM, an environmental SEM and a comprehensive range of SPMs capable of any measurement type including integrated raman spectroscopy. There is also sub-nanometre resolution imaging using the Helium Ion Microscope and a focussed ion beam system with integrated TEM.

We also have extensive experience in spinning-out commercial ventures and have a wide range of industrial, research and academic partners, in particular our partnership with Zeiss on the development of the Helium Ion Microscope. We are also involved in a range of professional activities in the areas of fabrication and characterisation in the UK and the world.

There is a commercial unit which handles access to the extensive fabrication and characterisation facilities housed within the Centre, for external users, both academic and industrial. They can be contacted at ecspartners@ecs.soton.ac.uk and +44 (0)23 8059 2650