About
Research
Access
Fabrication
Characterisation
Our Equipment
Booking System
SPM
Caliber SPM
Multimode SPM
Multiview 4000
Cryoview 2000
Mask aligner
EVG 620T
EVG 6200 Infinity
SEM
Zeiss EVO
Zeiss Orion
FEG-SEM
DLS
Zetasizer Nano
FIB
Zeiss NVision40
Dry Etch
DP01 RIE80+
DP06 RIE80+
DP07 ICP380 Oxide
DP02 ICP380 Metal
Ionfab300Plus
STS Pegasus
PECVD
OIPT Nanofab
OIPT System 100 LS
OIPT FlexAl ALD
OIPT Poly System 100
Epitaxy
ASM Epsilon 2000
Vapour Phase Etch
HF Vapour Phase Etcher
Resist Processing
EVG Resist Processing Station
